Optical diagnostic tools
Understanding of plasma characteristics is key to optimize your processes

Laser-based powder detector

Laser-based powder detector
  • Measurement of Si powder particles in the PECVD exhaust
  • Time-resolved or steady-state measurements
  • Particularly useful for microcrystalline deposition processes
  • Designed for harsh environments
  • Compact & flange-mountable

Infrared laser-based silane sensor

Infrared laser-based silane sensor
  • Direct absorption measurement of SiH4 in the infrared
  • Measurement in the exhaust or in the reactor of PECVD systems
  • Steady-state or time-resolved measurements
  • Determination of the SiH4 consumption efficiency,
    the SiH4 concentration in the plasma, and more.
  • Compact & flange-mountable

Plasma emission monitoring

Plasma emission monitoring
  • Control of the plasma stability
  • Detection of powder formation
  • Post-data treatment for better interpretation of optical emission
    spectra
  • Compact & flange-mountable

Ignition detector

Ignition detector
  • Optical detection of plasma ignition
  • High sensitivity to detect plasmas with low emission
  • Digital Output with adjustable threshold
  • Analog output of plasma intensity
  • Standard optic fiber connector for easy installation

INDEOtec products

 
 

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Contact Informations

Have questions, comments or specific inquiries? You may use following ways to reach us.
  • INDEOtec SA, Ave du Mail 59, Case postale 672,        
    2002 Neuchâtel, SWITZERLAND
  • +41 (0)32 930 29 26   &  FAX +41 (0)32 930 29 31

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