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Optical diagnostic tools
Understanding of plasma characteristics is key to optimize your processes
Laser-based powder detector
Measurement of Si powder particles in the PECVD exhaust
Time-resolved or steady-state measurements
Particularly useful for microcrystalline deposition processes
Designed for harsh environments
Compact & flange-mountable
Infrared laser-based silane sensor
Direct absorption measurement of SiH4 in the infrared
Measurement in the exhaust or in the reactor of PECVD systems
Steady-state or time-resolved measurements
Determination of the SiH4 consumption efficiency,
the SiH4 concentration in the plasma, and more.
Compact & flange-mountable
Plasma emission monitoring
Control of the plasma stability
Detection of powder formation
Post-data treatment for better interpretation of optical emission
spectra
Compact & flange-mountable
Ignition detector
Optical detection of plasma ignition
High sensitivity to detect plasmas with low emission
Digital Output with adjustable threshold
Analog output of plasma intensity
Standard optic fiber connector for easy installation
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OCTOPUS for R&D & Pilot Series
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Optical Diagnostic Tools