Our Technology - Transfer & Handling

Transfer & Handling


arious substrate pre-treatment and handling modules contribute to the flexibility and versatility of the OCTOPUS cluster tool system. No matter if preferably used for research purposes or for pilot scale test series, the tool can be configured according to the specific needs.

Examples of substrate treatment and handling modules

  • Loading / Unloading → including vacuum lock for pumping and venting processes
  • Heating module → for substrate pre-heating
  • Carrier exchange
Transfer module

Transfer module

  • Central unit, with up to 8 connecting ports
  • Fully automated robot for carrier plate or substrate transfer
  • Reliable, state-of-the-art pick and place system